Purified graphite: polysilicon manufacturing

We propose expendables and equipment dedicated to the polysilicon manufacturing industry:

The quartz reactor chamber contains very thin U-shaped silicon rods mounted on the purified graphite electrodes. The silicon rods heat up due to the electrical current supplied by the graphite electrodes. Gaseous trichlorosilane SiHCl3 (TCS) penetrates the deposition chamber at a high temperature and decomposes, depositing pure silicon on the hot rods. When the deposition process is completed, the silicon rods are removed from the reactor and shattered to recover the polysilicon.

Mersen supplies ultra-pure graphite electrodes, used as expendables for this process.

Inside a reactor's quartz chamber, silicon micro-grains are discharged into an opposite flow of silane. The reactor and the gas inlet are heated by a graphite heater and insulated by rigid felt. The silane breaks down into silicon and expands the micro-grains. The pure silicon is recovered in bead form.

During deposition processes, a significant part of the gas is transformed into STC (SiCl4 ). To increase the yield, this STC must be recycled as TCS in a high temperature hydrogenation reactor at 1,500 C.

Mersen is a recognised leader in this marketowing to its particularly competitive and comprehensive offer: